Resolving Precursor Deligation, Surface Species Evolution,...

The Journal of Physical Chemistry C 2013 / 05 Vol. 117; Iss. 21

Resolving Precursor Deligation, Surface Species Evolution, and Nanoparticle Nucleation during Palladium Atomic Layer Deposition

Lei, Yu, Lu, Junling, Zhao, Haiyan, Liu, Bin, Low, Ke-Bin, Wu, Tianpin, Libera, Joseph A., Greeley, Jeffrey P., Chupas, Peter J., Miller, Jeffrey T., Elam, Jeffrey W.
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Volume:
117
Language:
english
Journal:
The Journal of Physical Chemistry C
DOI:
10.1021/jp401196f
Date:
May, 2013
File:
PDF, 2.40 MB
english, 2013
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