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Residual stress measurement method in MEMS microbeams using frequency shift data
Somà, Aurelio, Ballestra, AlbertoVolume:
19
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/19/9/095023
Date:
September, 2009
File:
PDF, 919 KB
english, 2009