A new model for the diffusion of arsenic in polycrystalline...

A new model for the diffusion of arsenic in polycrystalline silicon

O’Neill, A. G., Hill, C., King, J., Please, C.
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Volume:
64
Year:
1988
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.341450
File:
PDF, 1022 KB
english, 1988
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