Reactive ion etching of nanocrystalline diamond for the...

Diamond and Related Materials 2013 / 06 Vol. 36

Reactive ion etching of nanocrystalline diamond for the fabrication of one-dimensional nanopillars

Evtimova, J., Kulisch, W., Petkov, C., Petkov, E., Schnabel, F., Reithmaier, J.P., Popov, C.
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Volume:
36
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2013.04.005
Date:
June, 2013
File:
PDF, 1.34 MB
english, 2013
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