Modelling effects of surface tension on surface topology in...

Modelling effects of surface tension on surface topology in spin coatings for integrated optics and micromechanics

Kucherenko, S S, Leaver, K D
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Volume:
10
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/10/3/301
Date:
September, 2000
File:
PDF, 199 KB
english, 2000
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