Modelling effects of surface tension on surface topology in spin coatings for integrated optics and micromechanics
Kucherenko, S S, Leaver, K DVolume:
10
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/10/3/301
Date:
September, 2000
File:
PDF, 199 KB
english, 2000