![](/img/cover-not-exists.png)
Comb-drive GaN micro-mirror on a GaN-on-silicon platform
Wang, Yongjin, Sasaki, Takashi, Wu, Tong, Hu, Fangren, Hane, KazuhiroVolume:
21
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/21/3/035012
Date:
March, 2011
File:
PDF, 845 KB
english, 2011