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Second-order sliding mode control of a 2D torsional MEMS micromirror with sidewall electrodes
Chen, H, Sun, W J, Sun, Z D, Yeow, J T WVolume:
23
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/23/1/015006
Date:
January, 2013
File:
PDF, 928 KB
english, 2013