Hexagonal microlens array modeling and fabrication using a thermal reflow process
Lin, Che-Ping, Yang, Hsiharng, Chao, Ching-KongVolume:
13
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/13/5/333
Date:
September, 2003
File:
PDF, 564 KB
english, 2003