Ion Conductivity of Ta$_{2}$O$_{5}$ Solid Electrolyte Thin...

Japanese Journal of Applied Physics 2012 / 1 Vol. 51

Ion Conductivity of Ta$_{2}$O$_{5}$ Solid Electrolyte Thin Film Prepared by Combination Sputtering with Radio Frequency Oxygen Plasma Irradiation

Noguchi, Daisuke, Taneda, Hiroshi, Higashimaru, Yukie, Kawano, Yoshihiko, Sei, Fumihiro
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Volume:
51
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.51.025801
Date:
January, 2012
File:
PDF, 706 KB
english, 2012
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