Planar Microassembly by Parallel Actuation of MEMS...

Journal of Microelectromechanical Systems 2008 / 08 Vol. 17; Iss. 4

Planar Microassembly by Parallel Actuation of MEMS Microrobots

Donald, B.R., Levey, C.G., Paprotny, I.
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Volume:
17
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2008.924251
Date:
August, 2008
File:
PDF, 2.68 MB
english, 2008
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