Deposition of thin organosilicon polymer films in...

Journal of Physics D Applied Physics 2004 / 08 Vol. 37; Iss. 15

Deposition of thin organosilicon polymer films in atmospheric pressure glow discharge

Trunec, D, Navrátil, Z, Stahel, P, Zají ková, L, Bur íková, V, Cech, J
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Volume:
37
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/37/15/010
Date:
August, 2004
File:
PDF, 357 KB
english, 2004
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