Effects of hydrostatic pressure on dopant diffusion in...

Effects of hydrostatic pressure on dopant diffusion in silicon

Park, Heemyong, Jones, Kevin S., Slinkman, Jim A., Law, Mark E.
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Volume:
78
Year:
1995
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.359944
File:
PDF, 1.18 MB
english, 1995
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