![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE SPIE Microtechnologies - Grenoble, France (Wednesday 24 April 2013)] Smart Sensors, Actuators, and MEMS VI - Optical actuation of silicon cantilevers: modelling and experimental investigation
Jiang, Fei, Keating, Adrian, Martyuink, Mariusz, Silva, Dilusha, Faraone, Lorenzo, Dell, John M., Schmid, Ulrich, Sánchez de Rojas Aldavero, José Luis, Leester-Schaedel, MonikaVolume:
8763
Year:
2013
Language:
english
DOI:
10.1117/12.2018431
File:
PDF, 278 KB
english, 2013