Molecular dynamics simulations of mechanical deformation of...

Journal of Applied Physics 2003 Vol. 94; Iss. 6

Molecular dynamics simulations of mechanical deformation of amorphous silicon dioxide during chemical–mechanical polishing

Chagarov, Evgueni, Adams, James B.
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Volume:
94
Year:
2003
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1602551
File:
PDF, 923 KB
english, 2003
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