Fabrication of ultrasmooth complementary split ring...

Microelectronic Engineering 2012 / 10 Vol. 98

Fabrication of ultrasmooth complementary split ring resonators by an improved template stripping method on SU-8

Liu, Zhe, Xia, Xiaoxiang, Yang, Haifang, Li, Junjie, Li, Wuxia, Gu, Changzhi
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Volume:
98
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2012.07.039
Date:
October, 2012
File:
PDF, 525 KB
english, 2012
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