Fabrication of Complex Structures on Nonplanar Surfaces...

Fabrication of Complex Structures on Nonplanar Surfaces Through a Transfer Method

Zeng, Xuefeng, Jiang, Hongrui
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Volume:
20
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2010.2100034
Date:
February, 2011
File:
PDF, 497 KB
english, 2011
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