SPIE Proceedings [SPIE Symposium on Micromachining and Microfabrication - Santa Clara, CA (Monday 20 September 1999)] Microfluidic Devices and Systems II - Fabrication of polymer high-aspect-ratio structures with hot embossing for microfluidic applications
Becker, Holger, Heim, Ulf, Roetting, O., Ahn, Chong H., Frazier, A. BrunoVolume:
3877
Year:
1999
Language:
english
DOI:
10.1117/12.359323
File:
PDF, 2.92 MB
english, 1999