Comparison of surface interactions for NH and NH[sub 2] on...

Journal of Applied Physics 2002 Vol. 92; Iss. 1

Comparison of surface interactions for NH and NH[sub 2] on polymer and metal substrates during NH[sub 3] plasma processing

Steen, Michelle L., Kull, Kristen R., Fisher, Ellen R.
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Volume:
92
Year:
2002
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1486038
File:
PDF, 452 KB
english, 2002
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