Growth of particles in cluster-size range in low pressure...

Journal of Applied Physics 1999 Vol. 86; Iss. 7

Growth of particles in cluster-size range in low pressure and low power SiH[sub 4] rf discharges

Fukuzawa, Tsuyoshi, Kushima, Shinji, Matsuoka, Yasuhiro, Shiratani, Masaharu, Watanabe, Yukio
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Volume:
86
Year:
1999
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.371256
File:
PDF, 386 KB
english, 1999
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