Recoil oxygen implants and thermal redistribution of oxygen...

Applied Physics Letters 1981 Vol. 39; Iss. 7

Recoil oxygen implants and thermal redistribution of oxygen in through-oxide arsenic-implanted Si

Magee, T. J.
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Volume:
39
Year:
1981
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.92795
File:
PDF, 550 KB
english, 1981
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