On the possibility of making a geometrically symmetric...

Journal of Physics D Applied Physics 2008 / 08 Vol. 41; Iss. 16

On the possibility of making a geometrically symmetric RF-CCP discharge electrically asymmetric

Heil, Brian G, Czarnetzki, Uwe, Brinkmann, Ralf Peter, Mussenbrock, Thomas
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Volume:
41
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/41/16/165202
Date:
August, 2008
File:
PDF, 926 KB
english, 2008
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