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Study of the piezoresistivity of doped nanocrystalline silicon thin films
Alpuim, P., Gaspar, J., Gieschke, P., Ehling, C., Kistner, J., Gonçalves, N. J., Vasilevskiy, M. I., Paul, O.Volume:
109
Year:
2011
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.3599881
File:
PDF, 2.94 MB
english, 2011