SPIE Proceedings [SPIE SPIE Advanced Lithography - San...

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SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 24 February 2013)] Advances in Resist Materials and Processing Technology XXX - The evolving complexity of patterning materials

Shimokawa, Tsutomu, Hishiro, Yoshi, Yamaguchi, Yoshikazu, Shima, Motoyuki, Kimura, Tooru, Takimoto, Yoshio, Nagai, Tomoki, Somervell, Mark H.
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Volume:
8682
Year:
2013
Language:
english
DOI:
10.1117/12.2014526
File:
PDF, 476 KB
english, 2013
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