Conduction mechanism of leakage current due to the traps in ZrO 2 thin film
Seo, Yohan, Lee, Sangyouk, An, Ilsin, Song, Chulgi, Jeong, HeejunVolume:
24
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/24/11/115016
Date:
November, 2009
File:
PDF, 335 KB
english, 2009