Stress Monitoring of Post-processed MEMS Silicon...

Experimental Mechanics 2012 / 11 Vol. 52; Iss. 9

Stress Monitoring of Post-processed MEMS Silicon Microbridge Structures Using Raman Spectroscopy

Starman, L., Coutu, R.
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Volume:
52
Language:
english
Journal:
Experimental Mechanics
DOI:
10.1007/s11340-011-9586-9
Date:
November, 2012
File:
PDF, 788 KB
english, 2012
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