Selective Iterative Etching of Fused Silica with Gaseous...

The Journal of Physical Chemistry C 2010 / 11 Vol. 114; Iss. 43

Selective Iterative Etching of Fused Silica with Gaseous Hydrofluoric Acid

Venturini, Francesco, Navarrini, Walter, Resnati, Giuseppe, Metrangolo, Pierangelo, Vazquez, Rebeca Martinez, Osellame, Roberto, Cerullo, Giulio
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Volume:
114
Language:
english
Journal:
The Journal of Physical Chemistry C
DOI:
10.1021/jp107055s
Date:
November, 2010
File:
PDF, 2.61 MB
english, 2010
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