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Determination of the conductance and thickness of semiconductor wafers and nanometer layers with the use of one-dimensional microwave photonic crystals
Nikitov, S. A., Gulyaev, Yu. V., Usanov, D. A., Skripalâ, A. V., Ponomarev, D. V.Volume:
58
Language:
english
Journal:
Doklady Physics
DOI:
10.1134/S1028335813010023
Date:
January, 2013
File:
PDF, 183 KB
english, 2013