Progress in Growth of Thick Epitaxial Layers on 4 Degree Off-Axis 4H SiC Substrates
Zhang, Jie, Chung, Gil Yong, Sanchez, Edward K., Loboda, Mark J., Sundaresan, Siddarth G., Singh, RanbirVolume:
717-720
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.717-720.137
Date:
May, 2012
File:
PDF, 1.60 MB
english, 2012