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Feedforward control of piezoactuators in atomic force microscope systems
Leang, Kam, Zou, Qingze, Devasia, SantoshVolume:
29
Language:
english
Journal:
IEEE Control Systems Magazine
DOI:
10.1109/MCS.2008.930922
Date:
February, 2009
File:
PDF, 1.68 MB
english, 2009