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Advances in engineering nanometrology at the National Physical Laboratory
Leach, Richard K, Claverley, James, Giusca, Claudiu, Jones, Christopher W, Nimishakavi, Lakshmi, Sun, Wenjuan, Tedaldi, Matthew, Yacoot, AndrewVolume:
23
Language:
english
Journal:
Measurement Science and Technology
DOI:
10.1088/0957-0233/23/7/074002
Date:
July, 2012
File:
PDF, 1.08 MB
english, 2012