Diffusing and swelling in SU-8: insight in material properties and processing
Wouters, Kristof, Puers, RobertVolume:
20
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/20/9/095013
Date:
September, 2010
File:
PDF, 1.38 MB
english, 2010