Diffusing and swelling in SU-8: insight in material...

Diffusing and swelling in SU-8: insight in material properties and processing

Wouters, Kristof, Puers, Robert
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
20
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/20/9/095013
Date:
September, 2010
File:
PDF, 1.38 MB
english, 2010
Conversion to is in progress
Conversion to is failed