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SPIE Proceedings [SPIE SPIE LASE - San Francisco, California (Saturday 22 January 2011)] Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XI - On the damage behaviour of Al2O3 insulating layers in thin film systems for the fabrication of sputtered strain gauges
Suttmann, Oliver, Klug, Ulrich, Kling, Rainer, Heisterkamp, Alexander, Neev, Joseph, Nolte, StefanVolume:
7925
Year:
2011
Language:
english
DOI:
10.1117/12.876134
File:
PDF, 1.14 MB
english, 2011