Reinforcement of PDMS masters using SU-8 truss structures
Govindaraju, Amitha, Chakraborty, Anirban, Luo, ChengVolume:
15
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/15/6/023
Date:
June, 2005
File:
PDF, 776 KB
english, 2005