SPIE Proceedings [SPIE SPIE Microtechnologies - Grenoble, France (Wednesday 24 April 2013)] Smart Sensors, Actuators, and MEMS VI - Modeling methods of MEMS micro-speaker with electrostatic working principle
Tumpold, D., Kaltenbacher, M., Glacer, C., Nawaz, M., Dehé, A., Schmid, Ulrich, Sánchez de Rojas Aldavero, José Luis, Leester-Schaedel, MonikaVolume:
8763
Year:
2013
Language:
english
DOI:
10.1117/12.2016468
File:
PDF, 396 KB
english, 2013