Simulation of Semiconductor Processes and Devices 2007 || Modeling and Characterization of Advanced Phosphorus Ultra Shallow Junction Using Germanium and Carbon Coimplants
Grasser, Tibor, Selberherr, SiegfriedVolume:
10.1007/97
Year:
2007
Language:
english
DOI:
10.1007/978-3-211-72861-1_8
File:
PDF, 231 KB
english, 2007