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Molecular Modeling and Multiscaling Issues for Electronic Material Applications || Understanding Cleaner Efficiency for BARC (“Bottom Anti-Reflective Coating”) After Plasma Etch in Dual Damascene Structures Through the Practical Use of Molecular Modeling Trends
Iwamoto, Nancy, Yuen, Matthew M.F., Fan, HaiboVolume:
10.1007/97
Year:
2012
Language:
english
DOI:
10.1007/978-1-4614-1728-6_3
File:
PDF, 2.13 MB
english, 2012