Investigation of zirconium oxynitride thin films deposited...

Journal of Physics D Applied Physics 2007 / 11 Vol. 40; Iss. 22

Investigation of zirconium oxynitride thin films deposited by reactive pulsed magnetron sputtering

Mohamed, S H, Abd El-Rahman, A M, Ahmed, Mahrous R
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Volume:
40
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/40/22/029
Date:
November, 2007
File:
PDF, 578 KB
english, 2007
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