Fourier-transform infrared and optical emission spectroscopy of CF[sub 4]/O[sub 2]/Ar mixtures in an inductively coupled plasma
Cruden, Brett A., Rao, M. V. V. S., Sharma, Surendra P., Meyyappan, M.Volume:
93
Year:
2003
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1563819
File:
PDF, 411 KB
english, 2003