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Atomic layer deposition of hafnium silicate film for high mobility pentacene thin film transistor applications
Lee, Seunghyup, Yun, Dong-Jin, Rhee, Shi-Woo, Yong, KijungVolume:
19
Year:
2009
Language:
english
Journal:
Journal of Materials Chemistry
DOI:
10.1039/b908216f
File:
PDF, 1.05 MB
english, 2009