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X-ray reflectometry study of diamond-like carbon films prepared by plasma enhanced chemical vapor deposition in a low pressure inductively coupled plasma
Salah, F., Harzallah, B., van der Lee, A., Angleraud, B., Begou, T., Granier, A.Volume:
537
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2013.04.033
Date:
June, 2013
File:
PDF, 597 KB
english, 2013