Defect structure of SiN[sub x]:H films and its evolution...

Journal of Applied Physics 2000 Vol. 88; Iss. 4

Defect structure of SiN[sub x]:H films and its evolution with annealing temperature

Martı́nez, F. L., del Prado, A., Mártil, I., Bravo, D., López, F. J.
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Volume:
88
Year:
2000
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1305548
File:
PDF, 291 KB
english, 2000
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