A novel meandered coplanar waveguide for RF microelectromechanical systems
Sun, Xiaofeng, Ding, Guifu, Li, Binhong, Shen, MinyiVolume:
17
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/17/8/028
Date:
August, 2007
File:
PDF, 364 KB
english, 2007