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SPIE Proceedings [SPIE MOEMS-MEMS Micro & Nanofabrication - San Jose, CA (Saturday 22 January 2005)] MOEMS Display and Imaging Systems III - Integrated deformable mirror on silicon for optical data storage
Fanget, Stephane, Labeye, Pierre R., Divoux, Claire, Hugon, Xavier, Urey, Hakan, Dickensheets, David L.Volume:
5721
Year:
2005
Language:
english
DOI:
10.1117/12.589123
File:
PDF, 284 KB
english, 2005