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Ozone-Based Atomic Layer Deposition of Alumina from TMA: Growth, Morphology, and Reaction Mechanism
Elliott, S. D., Scarel, G., Wiemer, C., Fanciulli, M., Pavia, G.Volume:
18
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm0608903
Date:
August, 2006
File:
PDF, 530 KB
english, 2006