Atomic Layer Deposition (Principles, Characteristics, and Nanotechnology Applications) || Fundamentals of Atomic Layer Deposition
Kääriäinen, Tommi, Cameron, David, Kääriäinen, Marja-Leena, Sherman, ArthurVolume:
10.1002/97
Year:
2013
Language:
english
DOI:
10.1002/9781118747407.ch1
File:
PDF, 627 KB
english, 2013