SPIE Proceedings [SPIE Optical Systems Design - Glasgow, Scotland, United Kingdom (Monday 1 September 2008)] Advances in Optical Thin Films III - High performance EUV multilayer optics
Kaiser, Norbert, Yulin, Sergiy, Perske, Marco, Feigl, Torsten, Kaiser, Norbert, Lequime, Michel, Macleod, H. AngusVolume:
7101
Year:
2008
Language:
english
DOI:
10.1117/12.796150
File:
PDF, 2.38 MB
english, 2008