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Influence of the amorphous/crystalline phase of Zr[sub 1âx]Al[sub x]O[sub 2] high-k layers on the capacitance performance of metal insulator metal stacks
Paskaleva, Albena, Lemberger, Martin, Bauer, Anton J., Weinreich, Wenke, Heitmann, Johannes, Erben, Elke, SchroÌder, Uwe, Oberbeck, LarsVolume:
106
Year:
2009
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.3204666
File:
PDF, 714 KB
english, 2009