THE FABRICATION AND CHARACTERIZATION OF METAL-OXIDE-SILICON...

Integrated Ferroelectrics 2008 / 06 Vol. 97; Iss. 1

THE FABRICATION AND CHARACTERIZATION OF METAL-OXIDE-SILICON CAPACITORS AND FIELD-EFFECT TRANSISTORS USING Dy 2 O 3 AND Sm 2 O 3 GATE DIELECTRICS

Hwang, Yu-Ren, Chang, Ingram Yin-ku, Wang, Ming-tsong, Lee, Joseph Ya-min
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Volume:
97
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584580802088892
Date:
June, 2008
File:
PDF, 551 KB
english, 2008
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