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Polycrystalline silicon-carbide surface-micromachined vertical resonators-part I: growth study and device fabrication
Wiser, R.F., Juyong Chung,, Mehregany, M., Zorman, C.A.Volume:
14
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2005.844747
Date:
June, 2005
File:
PDF, 4.22 MB
english, 2005