X-ray-diffraction study of crystalline Si nanocluster formation in annealed silicon-rich silicon oxides
Comedi, D., Zalloum, O. H. Y., Irving, E. A., Wojcik, J., Roschuk, T., Flynn, M. J., Mascher, P.Volume:
99
Year:
2006
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.2162989
File:
PDF, 393 KB
english, 2006